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  bfIII-V - KLA - Zeta-20 / Zeta-300 / Zeta-388 /Tpq



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lHcG[email protected]
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qܤEG+886-3-516-5177 Ext: 8284
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lHcG[email protected]
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Zeta-20 / Zeta-300 / Zeta-388 /Tpq



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icon 1. True Color CCD Camera
2. Zeta Optics Module with Z-Dot Technology
 ・Enable AutoFocus
 ・High efficiency illiumination for transparent substrates and films
 ・Optional X5 interferometer for high Z resolution wide area profiling
 ・Optional Nomarski imaging for very low roughness profiling
 ・Dual LED source to maximize signal from low reflectivity surfaces
 ・Trough transmissive illumination and dark field imaging options
3. Z-drive
 ・Precision mechanism for 13nm vertical resolution
 ・Optional 2nm resolution piezo Z drive
4. Zeta Control Box
 ・Enables fast high resolution data acquisition
 ・Optional Spectrometer for Film Thickness measurements
5. XY Stage
 ・Open architechture for convenient sample positioning
 ・Optional motorized XY stages

 
 
 
 
 
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